MEMS MICROPHONE AND MANUFACTURING METHOD OF THE SAME

摘要

PURPOSE: A MEMS microphone and manufacturing method thereof are provided to minimize a generation of a crack by minimizing a residue stress generated in a membrane and a back plate. CONSTITUTION: A silicon substrate(10) includes an air gap forming unit formed into a preset depth at a back chamber(41) and upper side of the back chamber. The membrane(25) is evaporated in an air gap forming unit and a silicon substrate of the silicon substrate. A back plate(37) is evaporated at an air gap forming unit or a silicon substrate for separating from the membrane. An interval of an air gap is formed between the back plate and a membrane. The interval of an air gap is controlled according to the depth go the air gap forming unit. An incline is formed in circumference of the air gap forming unit.