发明名称 METHOD FOR PRODUCTION OF A THERMOELECTRIC APPARATUS
摘要 The invention relates to a method for production of at least one thermoelectric apparatus with the steps of: preparation of a first wafer (1) which is formed from a thermoelectric material of a first conductivity type; preparation of a second wafer which is formed from a thermoelectric material of a second conductivity type; structuring of the first wafer (1) so that a group of first thermoelectric structures (7) is produced; structuring of the second wafer so that a group of second thermoelectric structures is produced; linking of the first to the second wafer in such a manner that the first and the second thermoelectric structures are electrically connected together and thus form the thermoelectric apparatus. According to the invention, before the structuring of the first wafer (1), a first contact material (3) is deposited on the first wafer (1) and/or before the structuring of the second wafer, a second contact material is deposited onto the second wafer.
申请公布号 US2011111546(A1) 申请公布日期 2011.05.12
申请号 US200913000576 申请日期 2009.06.23
申请人 MICROPELT GMBH 发明人 NURNUS JOACHIM;VOLKERT FRITZ;SCHUBERT AXEL
分类号 H01L21/02 主分类号 H01L21/02
代理机构 代理人
主权项
地址