发明名称 |
Surface acoustic wave device with a tungsten-aluminum layered interdigital transducer |
摘要 |
A surface acoustic wave device includes a surface acoustic wave substrate and an interdigital transducer provided on the surface acoustic wave substrate and including a laminated metal film in which a tungsten layer and an aluminum layer are laminated.
|
申请公布号 |
US6271617(B1) |
申请公布日期 |
2001.08.07 |
申请号 |
US19980140509 |
申请日期 |
1998.08.26 |
申请人 |
MURATA MANUFACTURING CO., LTD. |
发明人 |
YONEDA TOSHIMARO;KADOTA MICHIO |
分类号 |
H03H9/145;H03H9/25;H03H9/64;(IPC1-7):H03H9/25 |
主分类号 |
H03H9/145 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|