发明名称 Surface acoustic wave device with a tungsten-aluminum layered interdigital transducer
摘要 A surface acoustic wave device includes a surface acoustic wave substrate and an interdigital transducer provided on the surface acoustic wave substrate and including a laminated metal film in which a tungsten layer and an aluminum layer are laminated.
申请公布号 US6271617(B1) 申请公布日期 2001.08.07
申请号 US19980140509 申请日期 1998.08.26
申请人 MURATA MANUFACTURING CO., LTD. 发明人 YONEDA TOSHIMARO;KADOTA MICHIO
分类号 H03H9/145;H03H9/25;H03H9/64;(IPC1-7):H03H9/25 主分类号 H03H9/145
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