发明名称 METHOD OF FORMING A MICROSTRUCTURE
摘要 <p>A method of forming a microstructure comprising providing a substrate comprising a metallized structured surface region comprising a metal layer disposed the structured surface region, the metallized structured surface region comprising one or more recessed features having recessed surfaces, the metallized structured surface region substantially free of plateaus; disposing a fluid composition comprising a resist material and a liquid onto the metallized structured surface region; and evaporating liquid from the fluid composition, the resist material collecting on the recessed surfaces such that a remainder of the metallized structured surface region is substantially free of the resist material.</p>
申请公布号 KR20110049777(A) 申请公布日期 2011.05.12
申请号 KR20117001734 申请日期 2009.06.25
申请人 3M INNOVATIVE PROPERTIES COMPANY 发明人 STAY MATTHEW S.;PEKUROVSKY MIKAIL L.;MORA CRISTIN E.;FREY MATTHEW H.
分类号 C23C18/06;G03F7/00;H05K3/12 主分类号 C23C18/06
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