发明名称 |
METHOD OF FORMING A MICROSTRUCTURE |
摘要 |
<p>A method of forming a microstructure comprising providing a substrate comprising a metallized structured surface region comprising a metal layer disposed the structured surface region, the metallized structured surface region comprising one or more recessed features having recessed surfaces, the metallized structured surface region substantially free of plateaus; disposing a fluid composition comprising a resist material and a liquid onto the metallized structured surface region; and evaporating liquid from the fluid composition, the resist material collecting on the recessed surfaces such that a remainder of the metallized structured surface region is substantially free of the resist material.</p> |
申请公布号 |
KR20110049777(A) |
申请公布日期 |
2011.05.12 |
申请号 |
KR20117001734 |
申请日期 |
2009.06.25 |
申请人 |
3M INNOVATIVE PROPERTIES COMPANY |
发明人 |
STAY MATTHEW S.;PEKUROVSKY MIKAIL L.;MORA CRISTIN E.;FREY MATTHEW H. |
分类号 |
C23C18/06;G03F7/00;H05K3/12 |
主分类号 |
C23C18/06 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|