发明名称 Maskless Process for Suspending and Thinning Nanowires
摘要 Semiconductor-based electronic devices and techniques for fabrication thereof are provided. In one aspect, a device is provided comprising a first pad; a second pad and a plurality of nanowires connecting the first pad and the second pad in a ladder-like configuration formed in a silicon-on-insulator (SOI) layer over a buried oxide (BOX) layer, the nanowires having one or more dimensions defined by a re-distribution of silicon from the nanowires to the pads. The device can comprise a field-effect transistor (FET) having a gate surrounding the nanowires wherein portions of the nanowires surrounded by the gate form channels of the FET, the first pad and portions of the nanowires extending out from the gate adjacent to the first pad form a source region of the FET and the second pad and portions of the nanowires extending out from the gate adjacent to the second pad form a drain region of the FET.
申请公布号 US2011108804(A1) 申请公布日期 2011.05.12
申请号 US201113006833 申请日期 2011.01.14
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 BANGSARUNTIP SARUNYA;COHEN GUY;SLEIGHT JEFFREY W.
分类号 H01L29/775;B82Y40/00 主分类号 H01L29/775
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