| 摘要 |
PROBLEM TO BE SOLVED: To enhance detection accuracy on a defect position while enhancing determination accuracy on defect determination of a defect type in TFT array inspection. SOLUTION: This method of inspecting a TFT array includes a point defect detection process for detecting a defective pixel having a defective array from all pixels, a defect type determination process for determining the defect type of the defective pixel detected in the point detection process, and a defective pixel position specifying process for specifying the position of the defective pixel. A defective pixel is detected by the point defect detection process. A defect type is determined on the detected defective pixel through the defect type determination process. Further, the position of the defective pixel is specified through the defective pixel position specifying process. COPYRIGHT: (C)2011,JPO&INPIT |
