| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for refining a rare gas that brings a rare gas containing impurities into contact with a getter material under heating to remove the impurities contained in the rare gas, wherein the increase of pressure drop is suppressed even when many impurities are contained in the rare gas. <P>SOLUTION: The rare gas containing impurities is brought into contact with a first getter material having lower reactivity with the impurities and higher porosity than a second getter material to remove oxygen from the rare gas, and then is brought into the second getter material having higher reactivity with the impurities and lower porosity than the first getter material to remove impurities other than oxygen from the rare gas. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
