发明名称 |
Method for manufacturing semiconductor component e.g. pressure sensor, involves connecting partial region of rear side of semiconductor chip with bond pad on carrier substrate, where region is coated with through-contact filling material |
摘要 |
<p>The method involves connecting a semiconductor chip (110) with a starting substrate (112), where chip comprises a front side (130), which is turned towards the substrate, and a rear side (132). A through-contact filling material (142) is attached to the chip. A partial region (140) of the rear side of the chip is coated with the material. The chip is separated from the substrate and is attached to a carrier substrate. A partial region (140), which is coated with the material, of the rear side is connected with a bond pad on the carrier substrate, where the pad is made of aluminum.</p> |
申请公布号 |
DE102009046081(A1) |
申请公布日期 |
2011.05.12 |
申请号 |
DE20091046081 |
申请日期 |
2009.10.28 |
申请人 |
ROBERT BOSCH GMBH |
发明人 |
PRUEMM, ANDREAS;KRAFT, KARL-HEINZ;MAYER, THOMAS;HOECHST, ARNIM;SCHELLING, CHRISTOPH |
分类号 |
H01L21/60;H01R43/02;H05K3/32 |
主分类号 |
H01L21/60 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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