| 摘要 |
PURPOSE: A method for inspecting a rubbing cloth and a rubbing apparatus for inspecting a rubbing cloth are provided to inspect the file deviation between rubbing clothes and/or the file property of the rubbing cloth. CONSTITUTION: A method for inspecting a rubbing cloth comprises the steps of: polishing the surface of an inspection sheet with a rubbing cloth(10) by contacting the rubbing cloth to a rubbing cloth inspection sheet; and inspecting the pattern formed on the surface of the rubbing cloth inspection sheet through the file of the rubbing cloth. |
