| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique capable of reducing misdetections and misdiagnosis, in a capacitance sensor typified by acceleration sensor. SOLUTION: A capacitance element C1 and a capacitance element C2, constituting a capacitance detector, are electrically isolated from a capacitance element C3 and a capacitance element C4 constituting a forced oscillation generator. In other words, a movable electrode 8a for diagnosis constituting the capacitance element C3 and the capacitance element C4 is formed integrally with a movable portion 5, and a fixed electrode 8b for diagnosis and a fixed electrode 8c for diagnosis are electrically isolated from a fixed electrode 6b for detection and a fixed electrode 6c for detection. COPYRIGHT: (C)2011,JPO&INPIT |
