APPARATUS FOR MAKING THIN FILM

摘要

PURPOSE: A thin film depositing apparatus is provided to uniformly transfer a reaction gas onto the entire surface of a deposition object by using a driving unit which horizontally rotates a gas supply pipe of a gas jetting unit. CONSTITUTION: A support unit(120) supports a deposition object(11). A stopper(130) separates the support unit from the deposition object. A driving unit(140) and the support unit are connected by a driving shaft(141). A reacting gas supply unit(160) supplies a reaction gas inputted from the outside to the deposition object. A gas discharging unit(170) discharges a gas which is not reacted.