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发明名称
OZONE CONCENTRATION SENSOR
摘要
申请公布号
EP1730495(B1)
申请公布日期
2011.05.11
申请号
EP20050724791
申请日期
2005.03.07
申请人
MKS INSTRUMENTS, INC.
发明人
LEVINE, STEPHAN;SEIWERT, JOHANNES;LOHR, JOACHIM;BRAMMER, ULRICH;FITTKAU, JENS
分类号
G01N21/31
主分类号
G01N21/31
代理机构
代理人
主权项
地址
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