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发明名称
Micro oscillating device and mircro oscillating device array
摘要
申请公布号
EP1975674(B1)
申请公布日期
2011.05.11
申请号
EP20080103114
申请日期
2008.03.28
申请人
FUJITSU LIMITED
发明人
TSUBOI, OSAMU;MIZUNO, YOSHIHIRO;SONEDA, HIROMITSU;OKUDA, HISAO;MATSUMOTO, TSUYOSHI;KOUMA, NORINAO
分类号
G02B26/08
主分类号
G02B26/08
代理机构
代理人
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地址
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