发明名称 |
Electrostatic clamp, lithographic apparatus and method of manufacturing an electrostatic clamp |
摘要 |
An electrostatic clamp for use in a lithographic apparatus includes a layer of material provided with burls, wherein an electrode surrounded by an insulator and or a dielectric material is provided in between the burls. The electrostatic clamp may be used to clamp an object to an object support in a lithographic apparatus.
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申请公布号 |
US7940511(B2) |
申请公布日期 |
2011.05.10 |
申请号 |
US20070902501 |
申请日期 |
2007.09.21 |
申请人 |
ASML NETHERLANDS B.V. |
发明人 |
SIJBEN ANKO JOZEF CORNELUS |
分类号 |
H02N13/00 |
主分类号 |
H02N13/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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