发明名称 Capacitor element and semiconductor device
摘要 An object of the present invention is that the capacitance of MOS capacitors is changed without varying the kind of an impurity (a donor or an acceptor) in a channel formation region, and an n-type MOS capacitor and a p-type MOS capacitor are formed over a same substrate. By changing the offset length between a contact region and a channel formation region, the capacitance of a MOS capacitor can be changed without increasing the number of manufacturing process. Also, an n-type MOS capacitor and a p-type MOS capacitor can be formed over a same substrate only by changing the offset length. In addition, an n-type MOS capacitor and a p-type MOS capacitor can be formed over a same substrate by changing the dose amount of impurity with respect to a channel formation region while fixing the offset length.
申请公布号 US7939873(B2) 申请公布日期 2011.05.10
申请号 US20050190769 申请日期 2005.07.27
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 HONDA TATSUYA
分类号 H01L27/108 主分类号 H01L27/108
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