METHOD FOR DETERMINING HEIGHT MAP OF SURFACE OF OBJECT, AND APPARATUS THEREOF

摘要

PROBLEM TO BE SOLVED: To provide a method and an apparatus for determining a height map of the surface of an object through the use of white-light interferometry. SOLUTION: In a step of determining the height of each position in the surface of the object, the method for determining a height map of the surface of the object has the step of acquiring intensity signals of interference patterns by scanning the focal plane of an object lens in a height direction with respect to the object through the use of white-light interferometry and the step of estimating the position of each position in the surface of the object in the height direction having the greatest amplitude of the intensity signals and determining the height of each position in the surface of the object on the basis of the positions in the height direction. The step for estimating the position in the height direction having the greatest intensity signal includes the step of performing Fourier transform on the intensity signals; the step of removing noise signals by filtering Fourier-transformed signal; the step of performing inverse Fourier transform on filtered signals; and the step of determining the position of the center of gravity of inverse-Fourier-transformed signals and taking the position of the center of gravity as the position in the height direction. COPYRIGHT: (C)2011,JPO&INPIT