| 摘要 |
PURPOSE: A substrate inspecting system and substrate inspection method are provided to determine whether a foreign material is movable by comparing the coordinates and sizes of first and second inspected defects, thereby preventing foreign materials from being too much detected. CONSTITUTION: A first inspecting unit(110) inspects whether a defect occurs on the frontal surface of a substrate(105), and the coordinate and size of the defect. The first inspecting unit comprises a first photographing unit(111), a first driving unit(112), a first table unit(113), and a first cleaning unit(114). A second inspecting unit(120) inspects a defect formed on a substrate which is inspected by the first inspecting unit. The second inspecting unit includes a second photographing unit(121), a second driving unit(122), a second table unit(123), and a second cleaning unit(124). A controller(130) determines whether a defect occurs on the substrate by comparing the coordinates and sizes of inspected defects of the first and second inspecting units.
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