| 摘要 |
PROBLEM TO BE SOLVED: To provide a sputtering system for sputtering workpieces having non-planar surfaces (for example, concaves, pillars and steps of a case of a notebook computer). SOLUTION: The sputtering system 1 includes a vacuum chamber 10 including a work carrier 102, a first sputtering source 104, and a second sputtering source 106. The first sputtering source 104 is located above the work carrier 102 and sputters mainly a planar portion of the workpiece 2. The second sputtering source 106 is inclined at a given angle so as to sputter a vertical portion of the workpiece 2. COPYRIGHT: (C)2011,JPO&INPIT
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