METHOD FOR MANUFACTURING CHARGED PARTICLE BEAM SOURCE, CHARGED PARTICLE BEAM SOURCE AND CHARGED PARTICLE BEAM DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a charged particle beam source which can reliably form a minute projection of an atom level.

SOLUTION: The method for manufacturing the charged particle beam source covers a tip of a needle-like fine wire made of first metal with second metal, discharges charged particles from the tip of the needle-like fine wire with the second metal in a melted condition and then solidifies the second metal.

COPYRIGHT: (C)2011,JPO&INPIT