| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of drawing a pattern for magnetic transfer for drawing a pattern corresponding to a reference servo signal of a spiral system recorded by a magnetic head by using an electron beam. SOLUTION: A reference servo pattern is drawn by turning on/off irradiation with the electron beam while adding a periodical sawtooth wave-shaped deflection signal in a radial direction. In a drawing condition for scanning one track having track pitch Tp [nm] n times, the maximum amount of deflection by the sawtooth-shaped deflection signal is Tp/n [nm] and when the number of bits of one round in the circumferential direction of the pattern and the number of bits on the spiral trace while the position of a drawn dots upon advancing the spiral trace is shifted in the radial direction by one track are defined as A and B, respectively, the period of the sawtooth-shaped wave to be the deflection signal is(2πB)/(nA) [radian]. COPYRIGHT: (C)2011,JPO&INPIT
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