发明名称 Method of manufacturing semiconductor device and semiconductor device
摘要 A semiconductor device according to the embodiments comprises a gate insulator formed on a substrate, the gate insulator including a high-dielectric film in whole or part, a reaction film including a first metal on the gate insulator; a metal film including a second metal on the reaction film; and a film including Si formed on the metal film.
申请公布号 US2011101468(A1) 申请公布日期 2011.05.05
申请号 US20110929333 申请日期 2011.01.14
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 NAKAJIMA KAZUAKI
分类号 H01L29/772 主分类号 H01L29/772
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