发明名称 |
Vorrichtung und Verfahren zum Herstellen einer dünnen Platte |
摘要 |
The present invention is directed to a thin plate manufacturing apparatus for forming a thin plate on the surface of a substrate by dipping the substrate held by a substrate transport mechanism (1) in melting fluid, a thin plate manufacturing method, and a solar cell using the thin plate, the substrate transfer mechanism (1) installed so as to be movable in horizontal direction (104) along a horizontal moving shaft (8) installed so as to be movable along vertical moving shaft (9). Further, the substrate transfer mechanism (1) comprising a means for diagonally inclining the substrate (2) or a means for attaching/detaching the substrate, whereby the thin plate of flat shape can be provided and the shape of the thin plate thus obtained can be optimized. |
申请公布号 |
DE10297102(B4) |
申请公布日期 |
2011.05.05 |
申请号 |
DE2002197102 |
申请日期 |
2002.08.02 |
申请人 |
SHARP K.K. |
发明人 |
GOMA, SHUJI;GOKAKU, HIROZUMI;YANO, KOHZABUROH;TANI, ZENPEI |
分类号 |
C30B19/06;C30B19/04;C30B28/04;H01L21/00;H01L21/677;H01L21/68;H01L31/04;H01L31/18 |
主分类号 |
C30B19/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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