发明名称 Vorrichtung und Verfahren zum Herstellen einer dünnen Platte
摘要 The present invention is directed to a thin plate manufacturing apparatus for forming a thin plate on the surface of a substrate by dipping the substrate held by a substrate transport mechanism (1) in melting fluid, a thin plate manufacturing method, and a solar cell using the thin plate, the substrate transfer mechanism (1) installed so as to be movable in horizontal direction (104) along a horizontal moving shaft (8) installed so as to be movable along vertical moving shaft (9). Further, the substrate transfer mechanism (1) comprising a means for diagonally inclining the substrate (2) or a means for attaching/detaching the substrate, whereby the thin plate of flat shape can be provided and the shape of the thin plate thus obtained can be optimized.
申请公布号 DE10297102(B4) 申请公布日期 2011.05.05
申请号 DE2002197102 申请日期 2002.08.02
申请人 SHARP K.K. 发明人 GOMA, SHUJI;GOKAKU, HIROZUMI;YANO, KOHZABUROH;TANI, ZENPEI
分类号 C30B19/06;C30B19/04;C30B28/04;H01L21/00;H01L21/677;H01L21/68;H01L31/04;H01L31/18 主分类号 C30B19/06
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