摘要 |
A method and apparatus for forming solar cells is provided. In one embodiment, a photovoltaic device includes a first p-i-n junction cell formed on a substrate, wherein the p-i-n junction cell comprises a p-type silicon containing layer, an intrinsic type silicon containing layer formed over the p-type silicon containing layer, and a n-type silicon containing layer formed over the intrinsic type silicon containing layer, wherein the intrinsic type silicon containing layer comprises a first pair of microcrystalline layer and amorphous silicon layer. |
申请人 |
APPLIED MATERIALS, INC.;YANG, FAN;ZHANG, LIN;ZHENG, YI;SCHMITT, FRANCIMAR;YUAN, ZHENG |
发明人 |
YANG, FAN;ZHANG, LIN;ZHENG, YI;SCHMITT, FRANCIMAR;YUAN, ZHENG |