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发明名称
VERFAHREN ZUR VERFLACHUNG EINER FESTKÖRPEROBERFLÄCHE
摘要
申请公布号
DE602006020866(D1)
申请公布日期
2011.05.05
申请号
DE200660020866T
申请日期
2006.05.18
申请人
JAPAN AVIATION ELECTRONICS INDUSTRY LTD.
发明人
SATO, AKINOBU;SUZUKI, AKIKO;BOURELLE, EMMANUEL;MATSUO, JIRO;SEKI, TOSHIO
分类号
H01J37/30;H01L21/302
主分类号
H01J37/30
代理机构
代理人
主权项
地址
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