| 摘要 |
<p>A piezoelectric device is provided with a piezoelectric thin film (10) formed by peeling a sheet off a piezoelectric monocrystalline substrate (1); an inorganic layer (20) formed on the rear face (12) of the piezoelectric thin film (10); an elastomeric layer (30) disposed on the opposite-side surface of the piezoelectric thin film (10) from the inorganic layer (20); and a supporting body (40) affixed to the opposite-side surface from the inorganic layer (20) of the elastomeric layer (30). In the membrane structure portion, the inorganic layer (20) and the elastomeric layer (30) are placed across a voided layer (60) with respect to the piezoelectric thin film (10). The elastomeric layer (30) has a function of relaxing stress caused by affixing the piezoelectric thin film (10) that has been provided with the inorganic layer (20) to the supporting body (40), and is of a predetermined elasticity. The inorganic layer (20) comprises material of a greater elasticity than the elastomeric layer (30), and controls damping caused by placement of the elastomeric layer (30).</p> |
