| 摘要 |
PURPOSE: A probe sheet is provided to increase the location accuracy and stability of a probe terminal while eliminating the location mismatch between a terminal of an electronic circuit to be measured and a probe terminal. CONSTITUTION: A support substrate(12) is made of a material with the same thermal expansion coefficient as a material(22) of an electronic circuit to be measured. An elastic layer(14) is laminated on the support substrate. A resin layer(16) is laminated on the elastic layer. A plurality of probe terminals(18) is electrically contact a plurality of terminals(20A) respectively. A plurality of terminals is arranged on the electronic circuit.
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