| 发明名称 |
Device with microstructure and method of forming such a device |
| 摘要 |
Disclosed is a device comprising a substrate (10) carrying a microscopic structure (15) in a cavity (20) capped by a capping layer (18) comprising a material of formula SiN x H y , wherein x>1.33 and y>0. A method of forming such a device is also disclosed.
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| 申请公布号 |
EP2316789(A1) |
申请公布日期 |
2011.05.04 |
| 申请号 |
EP20090174891 |
申请日期 |
2009.11.03 |
| 申请人 |
NXP B.V. |
发明人 |
VAN WINGERDEN, JOHANNES;VERHEIJDEN, GREJA JOHANNA ADRIANA MARIA;KOOPS, GERHARD;VAN BEEK, JOZEF THOMAS MARTINUS |
| 分类号 |
B81C1/00 |
主分类号 |
B81C1/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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