Illumination device for a microlithographic projection apparatus having an element made of uniaxial crystal and having a plurality of refractive or diffractive structures extending along an axis being parallel or perpendicular to the crystal axis

摘要

The system has a light-conductance-increasing unit (100), which has a set of diffractive or refractive beam deflecting structures extending in a common direction (D1). The light-conductance-increasing unit has an optical uniaxial crystal material in such a manner that an optical crystal axis of the material is parallel or perpendicular to the direction. The unit (100) is arranged in such a manner that the optical crystal axis is perpendicular or parallel to a polarization direction of light striking at the unit (100). Independent claims are also included for: (a) a diffractive optical unit with a blazed grating (b) a method for microlithographically manufacturing a micro-structured unit (c) a micro-structured unit.