Apparatus and method for preventing contamination of camera view port of evaporation chamber,申请号KR20080033116-传众专利搜索

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发明名称	Apparatus and method for preventing contamination of camera view port of evaporation chamber
摘要
申请公布号	KR101032080(B1)	申请公布日期	2011.05.02
申请号	KR20080033116	申请日期	2008.04.10
申请人		发明人
分类号	C23C14/52;C23C14/24;H01L51/56;H05B33/10	主分类号	C23C14/52
代理机构		代理人
主权项
地址

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