ELECTRET, MANUFACTURING METHOD THEREFOR, AND ELECTROSTATIC INDUCTION TRANSFORMATION DEVICE EQUIPPED WITH ELECTRET

摘要

PROBLEM TO BE SOLVED: To provide electrets that are formed perpendicularly to a base material surface and arranged facing each other with a minute gap in-between, and also to provide a manufacturing method therefor, and an electrostatic induction transformation device equipped with these electrets. SOLUTION: An insulating material layer 12 is formed on worked surfaces perpendicular to the surfaces of base materials 10. The worked surfaces are formed of the single base materials 10 and arranged facing each other with a gap g in-between. The two base materials 10 are so held that they are moved substantially in parallel with the surfaces with the insulating material layers 12 formed thereon. A soft X-ray is applied from an opening of the gap by soft X-ray irradiation equipment 16 to ionize the components, such as oxygen and nitrogen, of the air present in the gap. The produced cations and anions are attracted to the insulating material layers 12 formed on the surfaces of the base materials 10 by bias voltage applied to between the base materials 10 from a bias voltage source 18. The ions are injected into the vicinity of the surfaces of the insulating material layers 12 to form the electrets. COPYRIGHT: (C)2011,JPO&INPIT