METHOD FOR CALIBRATING OFFSET AMOUNT AND MACHINE FOR MEASURING SURFACE PROFILE

摘要

PROBLEM TO BE SOLVED: To provide a method for calibrating offset amount which accurately calibrates an offset amount between a contact-type detector and an image probe, and to provide a machine for measuring surface profile using the same. SOLUTION: The method for calibrating offset amount that calibrates the offset amount between the contact-type detector and the image probe in the machine for measuring surface profiles include: a step of setting on a stage a calibration jig that has a surface being provided with a lattice pattern with a level difference; a step of measuring the lattice pattern of the calibration jig by the contact-type detector to obtain a reference position of the lattice pattern; a step of capturing the image of the lattice pattern of the calibration jig by the image probe to obtain a reference position of the lattice pattern; and a step of obtaining the offset amount from a difference between the reference positions obtained by the steps. COPYRIGHT: (C)2011,JPO&INPIT