| 摘要 |
PROBLEM TO BE SOLVED: To quickly form an extremely thin conductive thin film on the surface of an insulator sample for a method of forming a conductive film onto a sample surface in an Auger analysis device. SOLUTION: The Auger analysis device analyzes a sample 1 by applying electron beams to the sample 1 held by a sample holder 2, and detects Auger electrons radiated from the sample surface. In the Auger analysis device including a sample drive 4 for moving and tilting the sample 1; and an ion gun 6 for applying ions onto the sample surface, a member A for coating made of a conductive substance is mounted to a position where the member for coating can overlook the sample surface around the sample, the sample holder is driven by the sample drive 4 to dispose the member for coating on an ion beam passage from the ion gun, the ion beams are applied to the member for coating, and a conductive substance for coating sputtered from the member for coating is adhered to the sample surface. COPYRIGHT: (C)2011,JPO&INPIT |
