发明名称 ACTIVE RAY-SENSITIVE OR RADIATION-SENSITIVE RESIN COMPOSITION
摘要 <P>PROBLEM TO BE SOLVED: To provide an active ray-sensitive or radiation-sensitive resin composition and a pattern forming method using the composition excellent in sensitivity, resolution, roughness characteristics, pattern profiles and outgas characteristics; and to provide an active ray-sensitive or radiation-sensitive resin composition, which is curable with high sensitivity by irradiation with active rays or radiation, has excellent coloring property, image forming property and adhesiveness to a recording medium, has good storage stability and discharge stability and is suitable for inkjet recording. <P>SOLUTION: The active ray-sensitive or radiation-sensitive resin composition contains a sulfonium salt having an aryl group substituted with at least one alkoxyalkyl group or cycloalkoxyalkyl group. <P>COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011085670(A) 申请公布日期 2011.04.28
申请号 JP20090236706 申请日期 2009.10.13
申请人 FUJIFILM CORP 发明人 KAWABATA KENJI;TSUCHIMURA TOMOTAKA;ITO TAKAYUKI
分类号 G03F7/004;G03F7/038;G03F7/039;H01L21/027 主分类号 G03F7/004
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