发明名称 |
VACUUM APPARATUS INCLUDING A PARTICLE MONITORING UNIT, PARTICLE MONITORING METHOD AND PROGRAM, AND WINDOW MEMBER FOR USE IN THE PARTICLE MONITORING |
摘要 |
A particle monitoring apparatus includes a housing disposed on a gas exhaust line, a laser beam source for emitting a laser beam to particles in the gas exhaust line, a window member disposed at the housing for monitoring the particles in the gas exhaust line. The window member has a transparent base which is formed of a transparent resin or glass containing silicon and has a gas contact surface which faces a gas within the gas exhaust line, and a surface treatment layer formed on the gas contact surface of the transparent base, wherein the surface treatment layer contains one material selected from the group consisting of yttrium and calcium fluoride.
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申请公布号 |
US2011094680(A1) |
申请公布日期 |
2011.04.28 |
申请号 |
US20110985099 |
申请日期 |
2011.01.05 |
申请人 |
TOKYO ELECTRON LIMITED |
发明人 |
MORIYA TSUYOSHI;NAKAYAMA HIROYUKI |
分类号 |
H01L21/465;B08B5/04;B08B9/08;B08B13/00;B32B17/06;G01M19/00;G01N15/02;G01N15/06;G01N21/84;H01J37/32 |
主分类号 |
H01L21/465 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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