| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate storage container and a cover, such that even when substrate holding force by a retainer is increased, the cover is prevented from deforming and sensing and seal performance of the cover are not spoiled. <P>SOLUTION: The cover includes a cover body capable of accommodating a locking mechanism and a cover plate mounted on the cover body, wherein at least one of the cover body and the cover plate is made of a high-rigidity material. Then, at least the one of the cover body and cover plate made of the high-rigidity material is configured not to flex by ≥0.5 mm against the substrate holding force by the retainer in such a state that the cover body is mounted on the container body. Consequently, even when the substrate holding force is made larger than before, the cover is prevented from deforming. As a result, a detection defect of the cover can be prevented and a decrease in sealing performance between the container body and cover can be prevented. <P>COPYRIGHT: (C)2011,JPO&INPIT |
