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发明名称
Compensation for thermal siphoning in mass flow controllers
摘要
申请公布号
GB2446335(B)
申请公布日期
2011.04.27
申请号
GB20080009395
申请日期
2006.10.19
申请人
MKS INSTRUMENTS INC
发明人
DING JUNHUA;MICHAEL F L'BASSI;KAVEH H ZARKAR
分类号
G05D7/06
主分类号
G05D7/06
代理机构
代理人
主权项
地址
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