发明名称 |
METHOD FOR CONTROLLING DESPENSER APPRATUS |
摘要 |
PURPOSE: A method for controlling a dispensing apparatus is provided to prevent the repetition of a process for adjusting a gap between a substrate and a nozzle during a pattern forming process. CONSTITUTION: A dispensing apparatus includes a syringe, a nozzle, a valve, and a dispenser(200). A raw material is stored in the syringe. The nozzle dispenses the raw material on the substrate. The valve controls the connection between the syringe and the nozzle. The dispenser is horizontally moved to form a plurality of patterns(11) on the substrate. A gap between the nozzle and the substrate is maintained regardless of a dispensing operation. |
申请公布号 |
KR20110042582(A) |
申请公布日期 |
2011.04.27 |
申请号 |
KR20090099315 |
申请日期 |
2009.10.19 |
申请人 |
AP SYSTEMS INC. |
发明人 |
LEE, GEUN DEOK;KIM, JUNG DU;JANG, JAE NAM;CHOI, JAE MAN |
分类号 |
B05C5/00;H01L21/02 |
主分类号 |
B05C5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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