发明名称 |
PROCESS FOR MANUFACTURING A COMPONENT, PROCESS FOR MANUFACTURING A COMPONENT ARRANGEMENT, COMPONENT AND COMPONENT ARRANGEMENT |
摘要 |
A process for manufacturing a component is described. In a first manufacturing step a base structure having a substrate, a diaphragm, and a cavern region is provided. The diaphragm is oriented substantially parallel to a main plane of extension of the substrate. The cavern region is situated between the substrate and the diaphragm, and has an access opening. In a second manufacturing step, a first conductive layer is provided at least partially in the cavern region, in particular on a second side of the diaphragm facing the substrate, perpendicularly to the main plane of extension. |
申请公布号 |
EP2313338(A2) |
申请公布日期 |
2011.04.27 |
申请号 |
EP20090779687 |
申请日期 |
2009.06.09 |
申请人 |
ROBERT BOSCH GMBH |
发明人 |
KRAMER, TORSTEN;PINTER, STEFAN;BENZEL, HUBERT;ILLING, MATTHIAS;HAAG, FRIEDER;ARMBRUSTER, SIMON |
分类号 |
B81C1/00 |
主分类号 |
B81C1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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