| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a method and apparatus for forming a uniform film on a wall surface of (in particular, an inner wall surface) of a container irrespective of a shape or a size of a plastic container. SOLUTION: An outer electrode 26 is stored in a reactor 10, a plastic container 30 is stored in a space of the outer electrode 26, a space of the outer electrode 26 is made vacuum under a state in which an inner electrode 21 is stored in a container 30. When a high frequency electrical power is fed to the outer electrode 26 while raw material gas of a silicon oxide film is being fed into the container 30, the raw material gas is changed into plasma and a silicon oxide film is formed at a wall surface of the container 30. Since the outer electrode 26 is freely loaded into or unloaded out of the reactor 10, it is possible to use the outer electrode 26 formed with a space while it is being aligned with the outer shape of the container 30.</p> |
