发明名称 Ranged fault signatures for fault diagnosis
摘要 Process data is analyzed, the process data having been generated during a manufacturing process to detect a fault. One or more process variables of the manufacturing process that contributed to the fault are determined. A relative contribution of each of the one or more process variables to the fault is determined. A fault signature having relative contribution ranges for at least one of the one or more process variables is generated, the relative contribution ranges based on the determined relative contributions.
申请公布号 US7934125(B2) 申请公布日期 2011.04.26
申请号 US20070004667 申请日期 2007.12.19
申请人 APPLIED MATERIALS, INC. 发明人 HARVEY, JR. JERRY LYNN;SCHWARM ALEXANDER T.
分类号 G06F11/00 主分类号 G06F11/00
代理机构 代理人
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