| 摘要 |
A tilt inspection apparatus which detects tilt of an object to be observed with respect to a placement surface on which the object is placed, including: a light source which irradiates light or projects an image onto the object to be observed; a light shield plate which has a first slit extended in a first direction and a second slit extended in a second direction normal to the first direction, and is disposed between the light source and the object to be observed; and a carriage mechanism which supports the light shield plate so as to be rotatable in the in-plane direction of the light shield plate, and fixes the light shield plate while aligning the first slit normal to the placement surface is provided.
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