| 摘要 |
PROBLEM TO BE SOLVED: To provide light source device capable of adjusting impedance. SOLUTION: The light source device includes a microwave generation section 10 for generating microwaves; a center conductor 30 for radiating microwaves while being connected to the microwave generation section 10; a discharge lamp 35 connected to the central conductor 30 for discharge lighting by microwaves; a reflector 40 that surrounds the periphery of the discharge lamp 35 and is formed from a conductive material with one end is open; and a coaxial pipe 50, disposed between the microwave generating section 10 and the reflector 40. A high-frequency transmission mode transmitted from the microwave generation section 10 is set as a TEM mode; in the coaxial pipe 50, the center conductor 30 is an internal conductor and an outer pipe 56 is an external conductor. An adjustment rod 55 is disposed which is formed by metal or a dielectric of which the position is adjustable from the outer pipe 56 toward the center conductor 30. By adjusting the distance between the adjustment rod 55 and the center conductor 30, impedance is adjusted. COPYRIGHT: (C)2011,JPO&INPIT
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