| 摘要 |
The invention relates to a photo-acoustic gas sensor, comprising a resonance body and a device for detecting a vibration of the resonance body, comprising a device for optically detecting the location of at least one partial surface of the resonance body, wherein the resonance body and the device for detecting a vibration are disposed on exactly one substrate, and the resonance body is formed by means of at least one first recess of the substrate, and the substrate comprises a semiconductor material. The invention further relates to a method for producing and using such gas sensors. |
