| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus and a method for measuring a runout which can accurately measure a runout amount of an object to be checked. SOLUTION: The runout measuring apparatus (1) includes: a sensor holder (5) movable in a checking direction approximately parallel to a central axis of the object (10) to be checked; position sensors (7a, 7b), mounted on the sensor holder (5), for acquiring position information representing the position of the object to be checked on the plane orthogonal to the checking direction at a number of measuring positions along the checking direction; a drive part (6) for moving the sensor holder (5) along the checking direction; and a processing part (83) which derives the center position of the object (10) to be checked from the position information obtained at a number of the measuring positions, and then calculates the runout amount of the object (10) to be checked at least at one measuring position from position relationship between the center position and the central axis of the object (10) to be checked. COPYRIGHT: (C)2011,JPO&INPIT |
