CAPACITANCE SENSOR

摘要

Disclosed is a capacitance sensor that allows reduced power consumption as well as noncontiguous operation. A capacitance sensor (1) capable of detecting a first capacitance and a second capacitance comprises a material (10) that is electrically conductive and that forms a movable diaphragm (11), a thin film electrode (21) that forms the first capacitance in a space between the thin film electrode (21) and the diaphragm (11), a thin film electrode (31) that forms the second capacitance between the thin film electrode (31) and the diaphragm (11), a top layer material (20) that is disposed so as to form a space (S1) between the top layer material (20) and the diaphragm (11), and a bottom layer material (30) that is disposed so as to form a space (S2) between the bottom layer material (30) and the diaphragm (11). A gaseous body (A1) is sealed within the space (S1) and a gaseous body (A2) that has a different coefficient of thermal expansion from that of the gaseous body (A2) is sealed within the space (S2).