| 摘要 |
PROBLEM TO BE SOLVED: To provide a microwave irradiation device that can evenly heat a plurality of samples. SOLUTION: The microwave irradiation device includes: an irradiation chamber 4 that is a rectangular parallelepiped TM110-mode resonance cavity having an X-axis length of a (a>0), a Y-axis length of b (b>0), and a Z-axis length of c (c>0); a slit 4g provided on a Y-Z wall 4e structuring the irradiation chamber 4 and extended in the Z-axis direction; an underlay 7 inserted into the irradiation chamber 4 through the slit 4g and extended along an X-Z surface of the irradiation chamber 4 to a Y-Z wall 4f; a delivery positioning fixture 9 placed on top of the underlay 7 movable in the X-axis direction, movable into the irradiation chamber 4 through the slit 4g, and upon moving into the irradiation chamber 4, stopped at a prescribed position; and a sample holder 10 retained by a holder retainer provided on the delivery positioning fixture 9. COPYRIGHT: (C)2011,JPO&INPIT |
