VIBRATION PIECE, VIBRATOR, OSCILLATOR, AND ELECTRONIC APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a compact vibration piece suppressed in reduction of a Q value while ensuring impact resistance. SOLUTION: A piezoelectric vibration piece 20 having a so-called tuning fork outer shape includes: a base part 21; and a pair of vibration arms 22 branched from one end of the base part 21 and extending in parallel to each other. Each vibration arm 22 includes: a narrow part 23 where width between both side faces is relatively small; and a wide part 24 where width between both side faces is gradually increased toward the base part 21 side from the narrow part 23 at a root part connected to the base part 21, and widened at the root part connected with the base part 21. On both principal surfaces of each vibration arm 22, bottomed long grooves 26a, 26b are formed along the longitudinal direction. The long grooves 26a, 26b are formed so that the sum of the width t2 of a jetty part 25 of the wide part 24 and the width t2' of a jetty part 25' is smaller than the sum of the width t1 of the jetty part 25 of the narrow part 23 and the width t1' of the jetty part 25'. COPYRIGHT: (C)2011,JPO&INPIT