发明名称 HEATER UNIT
摘要 PROBLEM TO BE SOLVED: To provide a heater unit which can appropriately maintain a relative distance between an inner heater and an outer heater with a simple structure. SOLUTION: The heater unit 1 includes a heater 7 heated by energization, and a plurality of positioning members 4 restricting a position of the heater 7 in the planar direction. The heater 7 includes: the inner heater 8 arranged on an inner circumference side; and the outer heater 9 arranged on an outer circumference side of the inner heater 8. The positioning members 4 are arranged between the inner heater 8 and outer heater 9 to restrict the positions of the inner heater 8 and outer heater 9. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011081939(A) 申请公布日期 2011.04.21
申请号 JP20090231377 申请日期 2009.10.05
申请人 BRIDGESTONE CORP 发明人 YAMAKAWA MASABUMI
分类号 H05B3/68;H01L21/205;H01L21/3065;H05B3/00 主分类号 H05B3/68
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