SYSTEM FOR CONTROLLING SUBSTRATE TRANSFER ROBOT

摘要

PURPOSE: A system for controlling a substrate transfer robot is provided to reduce the consumption of power for driving the substrate transfer robot by feeding back regenerative energy which is generated in a regenerative operation to an input power. CONSTITUTION: In a system for controlling a substrate transfer robot, a body portion(10) supports a robot body. An arm portion(20) is installed in the end part of the body portion is operated to be extended or contracted. A hand part(30) is installed in the end par to of the arm portion and supports the substrate. A driving part(40) comprises a motor for driving the body portion and arm portion. A driver control device(300) controls the operation of the driving part of the substrate transfer robot. A power control system(700) controls the power provided from the power supply device to the substrate transfer robot.