A MANUFACTURING METHOD OF A HIGH PURITY ELECTROSTATIC CHUCK USING GLASS BONDING PROCESS AND AN ELECTROSTATIC CHUCK USING THE SAME

摘要

PURPOSE: A manufacturing method of a high purity electrostatic chuck using a glass bonding process and an electrostatic chuck using the same are provided to reduce the contamination of a chamber due to the etch on the surface of an electrostatic chuck when being exposed to high density plasma. CONSTITUTION: In a manufacturing method of a high purity electrostatic chuck using a glass bonding process and an electrostatic chuck using the same, an upper plate(100) and a lower plate(110) of high purity are provided. An align hole is formed in the upper and lower plate. A DC hole(130) for supplying power is additionally formed on the lower plate. An electrode(140) is printed on the upper plate. A junction glass is printed on the lower plate. The upper plate and the lower plate are combined.